Specifications
Brand Name :
ZMSH
Model Number :
SiC Mirror
Certification :
rohs
Place of Origin :
CHINA
MOQ :
25
Price :
by case
Payment Terms :
T/T
Delivery Time :
2-4 weeks
Packaging Details :
package in 100-grade cleaning room
Primary Material :
Ultra-high-purity SiC
Density :
~3.0 – 3.2 g/cm³
Elastic Modulus :
>400 GPa
Mohs Hardness :
9.5
Surface Roughness (Ra, DSP) :
≤ 0.5 nm
Coefficient of Thermal Expansion :
~4.5×10⁻⁶/℃
Description

SiC Mirror​ Introduction

​​Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror

A Small-Size Double-Side Polished Silicon Carbide (SiC) Mirror is a high-performance optical component manufactured from ​​ultra-high-purity silicon carbide (SiC) ceramic​​ through ​​precision machining and double-side polishing (DSP) technology​​. Its core features include ​​compact dimensions (typically ≤50mm in diameter or side length)​​ and ​​nanoscale surface finish on both sides​​, specifically designed for modern high-end optoelectronic systems with extreme requirements for ​​size, weight, stability, and optical precision​​. Leveraging the inherent properties of silicon carbide—​​ultra-high hardness, high stiffness, low thermal expansion, high thermal conductivity, and exceptional chemical stability​​—it is produced via processes such as ​​reaction sintering, chemical vapor deposition (CVD), or pressureless sintering​​. The implementation of ​​double-side ultra-precision polishing (surface roughness Ra typically ≤0.5 nm)​​ enables it to serve as a core component in many compact precision optical devices.

​​Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror​​Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror


SiC Mirror Characteristic

​​Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror

1. Ultra-Lightweight & Miniaturization​​:

  • The ​​compact design (e.g., 20–50mm diameter)​​ combined with SiC’s ​​low density (~3.1 g/cm³)​​ achieves ​​extremely light weight​​ and a ​​compact structure​​, making it ideal for space- and weight-sensitive integrated equipment.

2. ​​Superior Stability & Environmental Resistance​​:

  • The ​​low coefficient of thermal expansion (~4.5×10⁻⁶/℃)​​ and ​​high elastic modulus (>400 GPa)​​ ensure ​​exceptional dimensional and surface stability​​ under temperature fluctuations and mechanical vibrations, with strong resistance to deformation.

3. ​​Excellent Thermal Management​​:

​​Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror

  • ​​High thermal conductivity (~120–200 W/m·K)​​ facilitates rapid and uniform heat dissipation, preventing local hot spots and ensuring stable performance and reliability of optical systems under high-temperature or high-power conditions.

4. ​​Top-Tier Optical Surface Quality​​:

  • Through ​​double-side polishing technology​​, it achieves ​​nanoscale surface smoothness (Ra ≤ 0.5 nm) on both sides​​ and ​​ultra-high flatness/parallelism​​, minimizing light scattering and loss while ensuring high imaging quality.

5. ​​Outstanding Durability & Chemical Inertness​​:

  • ​High hardness (Mohs 9.5)​​ provides wear and scratch resistance, and ​​resistance to acids, alkalis, and plasma erosion​​ ensures long-term performance in harsh environments, extending service life.


SiC Mirror Application Scenario

​​Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS MicromirrorSmall-size double-side polished SiC mirrors are critically used in the following high-end fields due to their unique advantages:

​AR/MR Glasses Optical Systems​​:

As ​​diffractive waveguide lenses, prisms, or reflectors​​ for guiding and displaying light paths. Their ​​high refractive index (~2.65), lightweight, and small size​​ are key to achieving ​​slim glasses design, large field of view (FOV), and elimination of rainbow patterns​​.

  • ​​Semiconductor Lithography & Precision Inspection Equipment​​:

As ​​reflectors or lens substrates​​ in the illumination systems of ​​lithography machines​​ or sensors of ​​wafer inspection equipment​​. Their ​​high thermal stability and flatness​​ are crucial for maintaining ​​nanoscale overlay accuracy and inspection precision​​.

​​Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror

  • ​​High-End Laser Optical Systems​​:

Used in ​​laser galvanometers, laser interferometers​​, or as ​​reflectors/window mirrors in high-power lasers​​. Their ​​high damage threshold, high thermal conductivity, and stability​​ ensure ​​precise laser beam steering and long-term stable system operation​​.

  • ​​MEMS & Micro-Optics Fields​​:

As ​​substrate materials for MEMS micromirrors​​ or ​​substrates for micro-optical devices​​, applied in LiDAR, projectors, etc., meeting stringent requirements for ​​high-frequency response, high stability, and miniaturization​​.


SiC Mirror Key Material & Performance Parameters​​

​​Parameter Category​​ ​​Parameter Name​​ ​​Typical Value/Range​​
​​Material Characteristics​​ Primary Material Ultra-high-purity SiC
Density ~3.0 – 3.2 g/cm³
Elastic Modulus >400 GPa
Coefficient of Thermal Expansion ~4.5×10⁻⁶/℃
Thermal Conductivity ~120 – 200 W/(m·K)
Mohs Hardness 9.5
​​Optical & Surface Properties​​ Surface Roughness (Ra, DSP) ≤ 0.5 nm
Surface Figure Accuracy (PV/RMS) Up to λ/10 @ 632.8nm or better
​​Dimensional Characteristics​​ Common Size Range Diameter or side length 20–50mm
​​Functional Characteristics​​ Operating Temperature -50℃ to 500℃ (or higher, process-dependent)


ZMSH's SiC Ceramic Products

​​Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror

2. SiC Ceramic Vacuum Chuck ​​Flip-Chip Bonding Mirror Polishing High-Stiffness​​

​​Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror


SiC Mirror FAQ

1. Q: How do SiC mirrors work in optics?​​

A: SiC mirrors function by leveraging silicon carbide's ​​extremely low thermal expansion coefficient (~4.5×10⁻⁶/℃), high thermal conductivity (~120–200 W/m·K), and high stiffness (>400 GPa)​​ to maintain ​​nanoscale surface stability​​ under extreme temperatures and mechanical stress, ensuring minimal distortion in high-precision optical systems like space telescopes or EUV lithography equipment.


2. Q: How does a silicon carbide (SiC) mirror perform in extreme environments?​​

​​ A:​​ Silicon carbide (SiC) mirrors excel in extreme environments due to their ​​extremely low coefficient of thermal expansion​​ and ​​exceptional thermal stability​​. For instance, in space applications, they operate reliably across a temperature range from ​​-60°C to 180°C​​. In automotive LiDAR systems, where engine compartment temperatures can exceed ​​125°C​​, SiC mirrors maintain minimal surface deformation. Additionally, their ​​high hardness (Mohs hardness of 9.5)​​ and ​​superior chemical inertness​​ enable effective resistance to vibration, impact, and corrosion from acids or alkalis, ensuring long-term stability under harsh conditions.


Tags: #​​​​​​SiC Mirror, #Customized, #​​Double-Side Polished, #High-Purity, #Optical Component, #Corrosion-Resistant, #High-Temperature Rated​​, #MEMS Micromirror

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​​Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror

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Brand Name :
ZMSH
Model Number :
SiC Mirror
Certification :
rohs
Place of Origin :
CHINA
MOQ :
25
Price :
by case
Contact Supplier
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​​Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror
​​Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror
​​Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror
​​Double-Side Polished High-Purity SiC Mirror Optical Component for MEMS Micromirror

SHANGHAI FAMOUS TRADE CO.,LTD

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shanghai, shanghai
Since 2013
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Total Annual :
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