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SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm​​
SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm​​
SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm​​
SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm​​
SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm​​
SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm​​
Specifications
Brand Name :
ZMSH
Model Number :
SiC Ceramic Optical Path Board
Certification :
rohs
Place of Origin :
CHINA
MOQ :
5
Price :
by case
Payment Terms :
T/T
Delivery Time :
2-4 weeks
Packaging Details :
package in 100-grade cleaning room
Material Purity :
SiC ≥ 99.999%
Thermal Conductivity :
120–270 W/(m·K)
Refractive Index :
2.6–2.7
Surface Flatness :
≤1 μm
Surface Roughness (Ra)​​ :
≤0.01 μm
Operating Temperature :
-50℃ ~ 500℃
Description

​​SiC Ceramic Optical Path Board Introduction

SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm​​

SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm​​

A Silicon Carbide (SiC) Optical Path Board is a high-precision optical substrate manufactured from ​​ultra-high-purity silicon carbide ceramic​​, specifically designed for ​​dual optical path systems​​ in ​​wafer inspection equipment​​. It leverages the core material properties of silicon carbide—​​exceptional hardness, ultra-low coefficient of thermal expansion, high thermal conductivity, and high refractive index​​—to provide a ​​stable, thermally stable reference platform​​ for optical sensors and imaging systems. Through ​​precision grinding and polishing processes​​, it achieves ​​nanoscale flatness and surface roughness​​. Its ​​excellent chemical inertness​​ and ​​high stiffness ensure long-term performance in harsh semiconductor manufacturing environments, significantly enhancing inspection accuracy and equipment reliability.

​​SiC Ceramic Optical Path Board Key Technical Data

​​Parameter Category​​

​​Parameter Name​​

Typical Value/Range​​

Material Characteristics​​

Material Purity

SiC ≥99.999%

Coefficient of Thermal Expansion

~4.5×10⁻⁶/℃

Thermal Conductivity

120–270 W/(m·K)

Refractive Index

2.6–2.7

Elastic Modulus

>400 GPa

Functional Characteristics​​

Surface Flatness

≤1 μm

Surface Roughness (Ra)

≤0.01 μm

Operating Temperature

-50℃ ~ 500℃

SiC Ceramic Optical Path Board Characteristics

​​Feature Category​​ ​​Parameter Name​​ ​​Value/Specification​​
​​Weight Optimization​​ Ultra-Lightweight

Achieved via structural design and material selection
​​Environmental Stability​​ Ultra-High Stability

Exceptional resistance to thermal/mechanical stress
​​Thermal Performance​​ Coefficient of Thermal Expansion

Ultra-Low (e.g., ~4.5×10⁻⁶/℃)
​​Mechanical Property​​ Stiffness

High (e.g., Elastic Modulus >400 GPa)
​​Material Integrity​​ Density

High (e.g., ≥3.1 g/cm³)
​​Precision Metrics​​ Surface Flatness & Parallelism

≤0.02 mm
​​Dimensional Capability​​ Maximum Size

900 × 900 mm

SiC Ceramic Optical Path Board Main Application Areas


Silicon Carbide Optical Path Boards are critically applied in the following high-end fields due to their outstanding performance:

SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm​​

  1. ​​Semiconductor Inspection Equipment​​: Serves as the ​​core substrate​​ in ​​dual optical path systems​​ for ​​wafer defect detection, film thickness measurement, and overlay accuracy analysis​​, ensuring optical path stability and measurement repeatability.
  2. ​​AR/VR Optical Systems​​: Used as a ​​diffractive waveguide lens substrate​​ (e.g., Meta Orion AR glasses), supporting ​​wide field of view (70°+), low rainbow artifact display, and lightweight design (density ~3.1 g/cm³)​​.
  3. ​​High-End Photoelectric Instruments​​: Functions as an ​​optical platform​​ in ​​laser interferometers and spectral analysis equipment​​, reducing thermal drift and environmental vibration impacts on precision.
  4. ​​Photovoltaics and New Energy​​: Applied as a ​​heat dissipation substrate​​ for ​​photovoltaic inverter power modules​​, utilizing its high thermal conductivity to improve cooling efficiency.

About ZMSH

ZMSH specializes in the customized services of silicon carbide (SiC) optical path boards. With ​​sufficient reserves of ultra-high-purity silicon carbide raw materials​​ (purity ≥99.999%), and leveraging ​​advanced pressureless sintering and precision machining technologies​​ (such as nanoscale mirror polishing and micro-channel processing), it can precisely control product performance. The company is equipped with ​​fully automated production lines and a strict quality inspection system​​, supporting ​​one-stop customization​​ from design, prototyping to mass production, covering personalized needs for dimensions, shapes, hole positions, and functional characteristics (e.g., flatness ≤0.02mm). Simultaneously, we possess a ​​comprehensive global logistics network and a rapid response mechanism​​ to ensure efficient order delivery, providing ​​high-reliability and high-performance silicon carbide ceramic solutions​​ for fields such as semiconductors, optoelectronics, and new energy.

SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm​​

Q&A

1. Q: What are the key advantages of silicon carbide (SiC) optical path boards?​​

​​ A:​​ They offer ​​ultra-low thermal expansion (~4.5×10⁻⁶/℃), high thermal conductivity (120–270 W/m·K), and exceptional stiffness (>400 GPa)​​, ensuring ​​nanoscale flatness (≤0.02mm) and stability​​ under extreme conditions for precision optical systems.

​​2. Q: Where are silicon carbide optical path boards commonly used?​​

​​ A:​​ They are primarily used in ​​semiconductor wafer inspection equipment (e.g., dual-optical-path baseplates), AR/VR waveguide substrates, laser interferometers, and high-power photonic devices​​ due to their ability to maintain ​​optical alignment and thermal stability​​.


Tags: #SiC Ceramic Optical Path Board, #Customized, #Wafer Inspection Equipment, #Parallelism ≤0.02mm​​

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SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm​​

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Product Detail
Brand Name :
ZMSH
Model Number :
SiC Ceramic Optical Path Board
Certification :
rohs
Place of Origin :
CHINA
MOQ :
5
Price :
by case
Contact Supplier
SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm​​
SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm​​
SiC Ceramic Optical Path Board for Wafer Inspection Equipment Parallelism ≤0.02mm​​

SHANGHAI FAMOUS TRADE CO.,LTD

Verified Supplier
8 Years
shanghai, shanghai
Since 2013
Business Type :
Manufacturer, Agent, Importer, Exporter, Trading Company
Main Products :
Gallium Nitride Wafer, Sapphire Wafer, SiC Substrate
Total Annual :
1000000-1500000
Certification Level :
Verified Supplier
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