Plasma Resistant Semiconductor Industry Perfluorinated Ether Rubber Sealing O Ring

Description:

Perfluoroelastomer is a high-performance and high-priced sealing material.

So far, it is still the most expensive rubber in the world.

As perfluoroelastomer can save a lot of costs in terms of replacement, maintenance and safety,

in recent years, its application has been gradually extended to civilian fields such as electronics,

medicine, and chemical industries from the military and aerospace at the beginning of its development.

The main application fields and advantages of perfluoroether rubber:

Semiconductor manufacturing: resistance to washing and corrosive chemicals
Petroleum and chemical industry: resistance to chemicals and steam; anti-leakage control; mechanical seal
Food processing industry: chemical resistance, corrosion-resistant cleaning agent to a certain extent
Pharmaceutical industry: resistant to washing, extraction and corrosive chemicals
Machinery manufacturing industry: a certain degree of resistance to lubricants and additives
Transportation industry: resistance to common chemicals, must be resistant to cleaning media
Painting, dyeing, paint industry: solvent resistance
Agricultural chemical industry: chemical resistance

In these fields, perfluoroelastomers are used as ○-shaped rings, films, sealing rings, and sheets
(Including reinforced sheets), pipes, belts and special traditional molded parts are gradually increasing.
Application areas: The following processes in the manufacturing process of IC, LCD, LED, OLED

and other semiconductor industries.
Dry Etching, Wet Etching, CVD, PVD, Diffusion, etc.

Semiconductor products
The excellent performance of perfluoroelastomer makes its application deep into the entire

manufacturing system of semiconductor products. In this rapidly developing field, the reliability of

elastomer gaskets is very critical, and the cost of stopping production to replace gaskets is extremely high.

Therefore, every advantage of FFKM is fully utilized here: chemical resistance, thermal stability,

low Extractability, low permeability, and low gas evolution are all important.
At present, the semiconductor manufacturing industry has the greatest demand for perfluoro rubber.

For example, the waterless etching method requires doors and windows, as well as exhaust valves to

withstand highly corrosive chemicals; in the optical masking process, the seals used for filters,

electrical couplings and valves also have similar needs ; During the plasma CVD (Chemical Vapor Deposition) process,

the gaskets used in the vacuum chamber and the lid must be resistant to plasma damage;

in the cathode vacuum and sputtering methods, the gaskets are required to have the lowest leakage rate.

Material data sheet:

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