A63.7235 High-Throughput Field Emission Scanning Electron Microscope, is designed for cross-scale large-scale sample SEM characterization and analysis, widely used in research and industry. Its automated ultra-high-speed nano imaging technology provides you with an extraordinary imaging experience. |
![]() | ◉ Resolution 1.5nm@1Kv, Automatic Acquisition Stitching Large Image Up to cm2 Size ◉ Dual-channel Synchronous Imaging of SE And BSE Each 100M Pixels/s ◉ Comprehensive Imaging Speed > 10 Times That of Traditional Electron Microscopes ◉ Rapid Generation of Data Analysis Reports From Massive SEM Images ◉ Cross-scale Material Characterization From Millimeters to Nanometers |
A63.7235 High-Throughput Field Emission Scanning Electron Microscope, independently developed by Opto-Edu, and possessing independent intellectual property rights, achieves high-throughput imaging through systematic innovative design in imaging technology, motion platform, circuit control, and intelligent algorithms, with imaging speeds exceeding traditional electron microscopes by dozens of times. It adopts a technology solution that uses direct electron detectors, successfully overcoming the limitations of traditional SEM technology in speed, accuracy, and sample damage, revolutionizing the scanning electron microscope from a traditional nano "camera" to a nano "video camera." It is also easy to operate, with fully automated one-click sample switching and 24/7 unattended operation, significantly enhancing research efficiency. We apply mature industrial high-throughput electron microscope detection technology in fields such as life sciences, materials research, semiconductor industry, and geological resources. It has significant advantages, especially in applications such as 3D reconstruction in neurobiology, large-area characterization and analysis of materials, semiconductor reverse engineering, and nanotechnology analysis. |
A63.7235 High-Throughput Field Emission Scanning Electron Microscope | |
Electron Optical Lens | |
Electron Gun | Schottky Type Thermal Field Emission Electron Source Beam Current Stability <1%/day |
Objective Lens System | SORRIL™ Electromagnetic Compound Lens Sample Stage Deceleration Mode |
Resolution | 1.5 nm @ 1kV 1.3nm @ 3kV |
Immersion Electromagnetic Lens (*①) | |
Acceleration Voltage | 0.1-12 kV Continuously Adjustable (*②) |
Magnification | 500X~600,000X (SEM Image) 1X-600X (Optical Navigation) |
Beam Current | 50pA~30nA (*③) |
Standard Working Distance | 1.5mm |
Maximum Field of View | 100um (Standard Working Distance) 1mm (Maximum Working Distance) |
Electron Beam Blanker | Electrostatic Blanker |
Detector System | |
Electron Detector (Standard) | In-column SE Detector In-lens BSE Detector |
W.D. Height Detection | Focus Tracking™ Automatic Focus Tracking System |
Optical Navigation Accuracy | 15um |
Image Processor | |
Minimum Imaging Dwell Time | 10ns/pixel |
Fastest Imaging Flux | SE and BSE Each 100M Pixels/s |
Acquisition Method | Dual Channel Synchronous Acquisition SE+BSE |
Maximum Image Resolution | 24kx24k Pixels |
Image Averaging | Supports Point Averaging, Line Averaging, Area Averaging |
Sample Motion Platform | |
Travel | X=150mm, Y=150mm, Z=20mm, Maximum Sample Load 5kg |
Repeat Positioning Accuracy | X=±3um, Y=±3um, Z=±50nm (*④) |
Drive Method | X/Y Piezoelectric Ceramic Drive Z Stepper Motor + Piezoelectric Ceramic Drive |
Standard Sample Holder | 4~6 Inch Sample Loading Tray With Pre-vacuum Chamber Automatic Sample Feeding |
Optional: Loading Tray For SEM Standard Sample Holder | |
Image Enhancement Functional Software | |
Basic Control Software | Nanoscope: Independently developed user-friendly operating software for electron microscope image acquisition and measurement, featuring one-click image focusing and optimization adjustments, with real-time monitoring of image quality. |
Automatic Acquisition Stitching Software | ArrayScan: Based on Nanoscope for large area fully automatic image display acquisition, performing automatic pre-stitching of image maps and related tasks. |
Analysis Processing Software | ImageViewer: Independently developed based on Windows operating system, fast browsing and measurement of single ultra-high-definition images (24kX24k), automatic stitching/browsing of large volume ultra-high-definition images (1000X1000 images), signal-to-noise ratio optimization. |
User Development Interface | Supports C# and Qt versions: Open for users to call and use interface functions. |
* Note: | ①: Optional non-immersion electromagnetic lens for observing ferromagnetic materials; ②: Optional 0~30kV electron gun; ③: Optional 100nA; ④: Optional laser interferometer. |
▶ Ultra-fast Imaging ● Achieved dual-channel synchronous imaging of secondary electrons and backscattered electrons through independently developed hardware and software design: video-level high-resolution imaging; ● High-definition video-level frame rate allows real-time observation of sample dynamic changes; ▶ High Imaging Quality ● Unique immersion electromagnetic compound lens system effectively reduces optical aberrations of the objective lens at low landing energies, achieving extremely high resolution; ● Electrostatic scanning deflection system combined with the objective lens field greatly reduces image edge distortion compared to traditional electron microscope magnetic deflection systems, allowing for perfect images with both high resolution and large field of view; ● In-Lens SE and BSE semiconductor direct electron detectors enable dual-channel simultaneous high-speed imaging, with high sensitivity and high signal electron collection efficiency, achieving high image contrast and signal-to-noise ratio even under nA-level high beam current conditions; ● Equipped with an active compensation system (laser interference vibration compensation, electromagnetic interference active compensation) to eliminate environmental interference, ensuring high-resolution and high-quality imaging; ▶ Cross-Scale Large-Scale Imaging ● Ultra-high-speed scanning imaging capability, combined with a fully automatic focusing tracking system and A.I. image processing algorithms, enables high-resolution fully automatic uninterrupted matrix scanning of ultra-large area samples, automatically stitching to obtain large-size nanometer-level resolution panoramic imaging, providing cross-scale information fusion capability, achieving cross-scale material characterization from nanometers to millimeters; |
▶ Intelligent Analysis ● Big data intelligent analysis, rapid generation of data analysis reports from massive SEM images; ● Intelligent image processing, customized image measurement, statistics, and analysis; ▶ Simple Operation ● Fully automatic sample loading and navigation, one-click sample replacement, convenient operation, saving labor time. Large field optical imaging navigation seamlessly connects with SEM imaging, quickly and accurately locating and observing specified areas; ● 24/7 fully automated unmanned operation capability. |
① Schottky field emission electron gun Ensure high resolution at high magnification ② SORRILTM composite electromagnetic objective system Unique immersion electromagnetic composite objective system achieves the fastest imaging speed ③ Optical navigation system Panoramic high-definition optical navigation quickly obtains SEM images ④ Fully automatic sample exchange system Seamless connection between optical and SEM images, accurate positioning and observation | ⑤ Focus on tracking system Minimize focusing time without adjusting the focal length of the lens, saving more time to improve imaging speed ⑥ High speed piezoelectric nano motion platform Piezoelectric driven XY stage has faster movement speed and higher accuracy compared to standard stages ⑦ Real time computing image processing server 7*24 hours uninterrupted image acquisition and processing |
Observe the microstructure of cells in mouse brain, heart, liver, kidney and other parts under scanning electron microscopy, and use Arrays Scan to perform fully automatic scanning on the target area samples of interest Intermittent matrix scanning, continuously capturing multiple high-resolution images. |
The sample is prepared using a continuous slicing method, collecting up to hundreds of slices, placing them on a sample circle, and loading them into SEM at once |
Pathological Analysis Comprehensively collect all detailed information on the entire slice, and zoom in on any area to clearly observe the subcellular organelle ultrastructure on the kidney tissue |
Lithium battery negative electrode plate: used for defect detection and positioning Identify foreign objects on polarizer to achieve information correlation between macroscopic sample overview and microscopic details. |
Cross scale characterization analysis of nickel based single crystal high-temperature alloy materials Cross scale analysis of primary and secondary carbides in nickel based single crystal high-temperature alloy materials |
Combining geology, rock physics, and petroleum engineering to study the pore scale microstructure of shale gas/oil reservoir rocks. Excellent contrast and signal-to-noise ratio performance under different mineral compositions. Large area high-speed high-resolution image Geological sample panorama, 2.0mm * 0.5mm, a total of 770 images, with a total collection time of 1.01h |