Plane Scanning Atomic Force Microscope

• Gantry scanning head design, marble base, vacuum adsorption stage, sample size and weight are basically unlimited
• A62.4510 + Closed-loop three-axis independent pressure shift scanner, which can scan with high precision in a wide range
• Intelligent needle feeding method with automatic detection of motor-controlled piezoelectric ceramics to protect probes and samples
• Automatic optical positioning, no need to adjust focus, real-time observation and positioning probe sample scanning area
• Equipped with closed metal shield, pneumatic shock-absorbing table, strong anti-interference ability

◆ The first commercial atomic force microscope in China to realize combined mobile scanning of probe and sample;

◆ The first in China to use a three-axis independent closed-loop piezoelectric shift scanning table to achieve large-scale high-precision scanning;

◆ Three-axis independent scanning, XYZ does not affect each other, very suitable for three-dimensional material and topography detection;

◆ Electric control of sample moving table and lifting table, which can be programmed with multi-point position to realize fast automatic detection;

◆ Gantry scanning head design, marble base, vacuum adsorption and magnetic adsorption stage;

◆ The motor automatically controls the intelligent needle feeding method of the piezoelectric ceramic automatic detection to protect the probe and the sample;

◆ High magnification auxiliary optical microscope positioning, real-time observation and positioning of probe and sample scanning area;

◆ The closed-loop piezoelectric scanning stage does not require nonlinear correction, and the nanometer characterization and measurement accuracy is better than 99.5%.

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• 	A62.4510	A62.4511
  Work Mode	Contact Mode Tapping Mode 【Optional】 Friction Mode Phase Mode Magnetic Mode Electrostatic Mode	Contact Mode Tapping Mode 【Optional】 Friction Mode Phase Mode Magnetic Mode Electrostatic Mode
  Current Spectrum Curve	RMS-Z Curve F-Z Force Curve	RMS-Z Curve F-Z Force Curve
  XY Scan Mode	Probe Driven Scanning, Piezo Tube Scanner	Sample Driven Scanning, Closed Loop Piezoelectric Shift Scanning Stage
  XY Scan Range	70×70um	Closed Loop 100×100um
  XY Scan Resolution	0.2nm	Closed Loop 0.5nm
  Z Scan Mode		Probe Driven Scanning
  Z Scan Range	5um	5um
  Z Scan Resolution	0.05nm	0.05nm
  Scan Speed	0.6Hz~30Hz	0.6Hz~30Hz
  Scan Angle	0~360°	0~360°
  Sample Weight	≤15Kg	≤0.5Kg
  Stage Size	Dia.100mm 【Optional】 Dia.200mm Dia.300mm	Dia.100mm 【Optional】 Dia.200mm Dia.300mm
  Stage XY Moving	100x100mm, Resolution 1um 【Optional】 200x200mm 300x300mm	100x100mm, Resolution 1um 【Optional】 200x200mm 300x300mm
  Stage Z Moving	15mm, Resolution 10nm 【Optional】 20mm 25mm	15mm, Resolution 10nm 【Optional】 20mm 25mm
  Shock-Absorbing Design	Spring Suspension 【Optional】 Active Shock Absorber	Spring Suspension 【Optional】 Active Shock Absorber
  Optical System	Objective 5x 5.0M Digital Camera 【Optional】 Objective 10x Objective 20x	Objective 5x 5.0M Digital Camera 【Optional】 Objective 10x Objective 20x
  Output	USB2.0/3.0	USB2.0/3.0
  Software	Win XP/7/8/10	Win XP/7/8/10
  Main Body	Gantry Scan Head, Marble Base	Gantry Scan Head, Marble Base

• Microscope	Optical Microscope	Electron Microscope	Scanning Probe Microscope
  Max Resolution (um)	0.18	0.00011	0.00008
  Remark	Oil immersion 1500x	Imaging diamond carbon atoms	Imaging high-order graphitic carbon atoms

• Probe-Sample Interaction	Measure Signal	Information
  Force	Electrostatic Force	Shape
  Tunnel Current	Current	Shape, Conductivity
  Magnetic Force	Phase	Magnetic Structure
  Electrostatic Force	Phase	charge distribution

• 	Resolution	Working Condition	Working Temperation	Damge to Sample	Inspection Depth
  SPM	Atom Level 0.1nm	Normal, Liquid, Vacuum	Room or Low Temperation	None	1~2 Atom Level
  TEM	Point 0.3~0.5nm Lattice 0.1~0.2nm	High Vaccum	Room Temperation	Small	Usually <100nm
  SEM	6-10nm	High Vaccum	Room Temperation	Small	10mm @10x 1um @10000x
  FIM	Atom Level 0.1nm	Super High Vaccum	30~80K	Damge	Atom Thickness

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